描述
MC-4/11/10/400 ELAU
ELAU MC-4/11/10/400是一款高性能伺服驱动器，专为各种工业应用而设计。
它能够控制功率高达400W的无刷伺服电机，非常适合在苛刻的环境中使用。
ELAU MC-4/11/10/400的参数如下：
输入电压：3×400vac±10%。
输出电压：3×0~400vac。
最大输出电流：11a。
VEXTA STEPPING MOTOR MODEL PX243-01B
LAM 6 ” SPIN CHUCK PART # 715-013718-006
AMAT PART # 0200-09086
SLOW VACUUM VALVE MODEL # FPR-91-9.52
PEDESTAL VACUUM PRESSURE SWITCH PART # 0090-77032
LAM RESEARCH BAFFLE PLATE LOWER PART # 715-011913-083
USHIO 100W Merqury Short Lamp
AMAT PART # 0020-21944 8″ QTZ PRECLEAN PLATE
CERAMIC LIFT PIN/SHORT PART # 0200-10162
796-00809 ANGLE VALVE REBUILD KIT
CONN ADPTR MTG QDS-UL(F)/QC(M) AMAT PART # 0020-04376
LIFT PIN, .090, SIMPLE CATH AMAT PART # 0021-10566
AMAT PART # 0200-35224 VIEWPORT WINDOW
AMAT PART # 0200-35160
FRAME ALIGNMENT PIN PART # 0020-27812
VACUUM SWITCH PART # 853-017631-001
TEFLON RING BLOCKER AMAT PART # 0021-38799
LOWER MAGNETIC BRACKET AMAT PART # 0021-36605
AMAT PART # 0200-35013
BRACKET COIL FRONT PART #0021-36606
JUMPER 4PIN CONN, GEN RACK EMO AMAT PART# 0150-20143
GASKET WINDOW AMAT PART # 0190-09061
